MASS SPECTROMETRIC ANALYSIS OF SURFACES

摘要

In order to facilitate a mass spectrometric analysis of the content of surfaces, it is necessary to bring the analyte molecules into the gas phase. This is done with a tightly focused, preferably pulsed laser beam. This laser beam is focused onto the surface with a mirror that is placed as close as possible to the analysed surface. In order to achieve a very small focal point, deflection and focusing of the laser beam is done with a single optical element. The evaporated material passes through a opening in the mirror into the mass spectrometer. It is also possible to let the evaporated material pass right next to the mirror into the mass spectrometer. Preferably this invention is combined with a time-of-flight mass-spectrometer by placing it behind the ion optics, as viewed in the direction of acceleration of the time-of-flight mass-spectrometer.