VERFAHREN UND VORRICHTUNG ZUM MESSEN DER TEMPERATUR EINES OBJEKTES, BESONDERS EINES HALBLEITERS, MITTELS ELLIPSOMETRIE,申请号DE19936016919-传众专利搜索

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发明名称	VERFAHREN UND VORRICHTUNG ZUM MESSEN DER TEMPERATUR EINES OBJEKTES, BESONDERS EINES HALBLEITERS, MITTELS ELLIPSOMETRIE
摘要
申请公布号	DE69316919(D1)	申请公布日期	1998.03.12
申请号	DE19936016919	申请日期	1993.11.19
申请人	ECOLE CENTRALE DE LYON, ECULLY, FR	发明人	JOSEPH, JACQUES, F-69130 ECULLY, FR;HU, YAO-ZHI, CHAPEL HILL, NC 27519, US;IRENE, EUGENE, CHAPEL HILL, NC 27514, US
分类号	G01B11/06;G01K11/12;(IPC1-7):G01J5/00;G01N21/21	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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