发明名称 Reflection type rotary optical coder
摘要 The optical coder includes a reflection plate (1), with which a coding light reflection patter (31) is formed on a transparent substrate. The coding light reflection pattern (31) is formed so that a metal layer is vaporised on the surface of the transparent substrate (2). This metal layer is superimposed by a shadow layer (4), from a photosensitive material on the surface of the vaporised metal layer. The shadow layer is partially etched, in order to partially expose the vaporised layer, for the forming of the coding light reflection pattern.
申请公布号 DE19738965(A1) 申请公布日期 1998.03.12
申请号 DE19971038965 申请日期 1997.09.05
申请人 HARMONIC DRIVE SYSTEMS INC., TOKIO/TOKYO, JP 发明人 ITOH, YOSHINORI, NAGANO, JP;CHINO, TADAO, YOKOHAMA, KANAGAWA, JP
分类号 G01D5/30;C23C14/04;C23F1/00;G01P3/486;H03M1/30;(IPC1-7):H03M1/24;G01B7/30;G01P3/36 主分类号 G01D5/30
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