Semiconductor sensor array for chemical or medical applications

摘要

Semiconductor sensor array, especially for chemical analysis, process control and for medical applications, has interdigital micro-electrodes (2) in the form of ion implanted layers within a semiconductor substrate (1) or within a dielectric insulator layer or layer structure on the semiconductor substrate. When the implanted layers are within the substrate, they comprise different dopant concentration regions in the form of conductive pn-junctions within a 10 mu m to 5 mm (preferably 200 mu m to 1 mm) thick Si or Ge substrate and, when they are within a dielectric insulator layer, the layer preferably contains SiO2, Al2O3, Si3N4 and/or Ta2O5 and is 5 nm to 1 mu m (preferably 20-500 nm) thick. Also claimed is a process for producing the above sensor array by ion implantation.