| 摘要 |
<p>A projection optical system which has high efficiency and a wide exposure area is used to provide a desired image surface flatness and yet is of a practical size. A first element group including at least two pairs of convex surfaces facing each other, a second element group including at least two pairs of concave surfaces facing each other, a third element group including at least two pairs of convex surfaces facing each other, a fourth element group including at least two pairs of concave surfaces facing each other, and a fifth element group including at least two pairs of convex surfaces facing each other are provided, in that order, from a side of an object. Various predetermined conditions are satisfied. <IMAGE></p> |
