Optocoupler with photon transmitter and receiver function

摘要

The optocoupler includes a transmitter and receiver, with the transmitter and receiver function being provided inside a single layer sequence. Either the transmitter or receiver function is formed in the layer stack, e.g. of Si or SiGe, in limited, lateral definition, while the other function surrounds the first one laterally, at least partly. If there are lateral intermediate spaces between the two functions, the spaces are filled with light waves conducting material. Several components are located on a single wafer with buried SiO2 layer, one as transmitter of photon generator/emitter on electric excitation, and one as receiver of photodetector type, absorbing of transmitted photons.