发明名称 Method for collecting impurities in the atmosphere by state and apparatus for analyzing the same in real time
摘要 A suction pump draws by suction an atmosphere sample into a gas component collecting section to collect a gas component in the atmosphere into an absorption liquid 48a and thereafter collect a particle component into absorption liquids. A liquid transfer pump transfers the absorption liquids to a measurement standby vessel to make them stand by. When measurement of the absorption liquid is completed, a liquid transfer on-off valve opens to transfer the absorption liquids to an analysis apparatus to make it execute measurement. A liquid transfer pump supplies new absorption liquid when a gas component collecting use absorption liquid vessel and first and second stage impinger sections are emptied. By thus executing collecting, condensation and measurement in parallel by the gas component and the particle component, a state-by-state analysis of the impurities in the atmosphere can be automatically executed in real time.
申请公布号 US5725634(A) 申请公布日期 1998.03.10
申请号 US19960678695 申请日期 1996.07.11
申请人 SHARP KABUSHIKI KAISHA 发明人 TAKASUGA, MASAMI;MUKAI, TOSHIO
分类号 G01N1/02;G01N1/22;G01N1/24;G01N1/40;G01N33/00;H01L21/02;(IPC1-7):B01D53/22;B01D53/14 主分类号 G01N1/02
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