HEAT-TREATING METHOD AND VERTICAL HEAT-TREATING FURNACE,申请号JP19970211325-传众专利搜索

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发明名称	HEAT-TREATING METHOD AND VERTICAL HEAT-TREATING FURNACE
摘要
申请公布号	JPH1070113(A)	申请公布日期	1998.03.10
申请号	JP19970211325	申请日期	1997.07.22
申请人	YAMAHA CORP	发明人	YUKI TOMOHIRO
分类号	H01L21/22;H01L21/31;(IPC1-7):H01L21/31	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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