| 摘要 |
PROBLEM TO BE SOLVED: To minimize a loss time in production by transferring materials onto another processing chamber without taking out the materials from a device in the course of its transfer operation when any trouble occurs in a processing chamber to which the materials are to be transferred so that operation in the chamber is stopped. SOLUTION: For example, when a processing chamber 1B is stopped in its operation due to any reason such as a trouble in the course of transfer operation in which a transfer part 2 performs transfer operation for materials to the processing chamber 1B, the chamber 1B immediately sends a carrying-in cancel signal to the transfer part 2. Then, with the reception thereof, the transfer part 2 interrupts the transfer operation. On the other hand, when the transfer part 2 receives a material carrying-in request from another processing chamber, it starts the transfer of the material to the chamber 1A from the interrupted position. Even if a processing chamber is stopped in its operation due to a trouble and the like, with a carrying-in cancel signal to be sent, the material being in the couse of transfer operation can be transferred in this way onto another processing chamber without taking out the material from a device. Accordingly, a loss time in production is minimized. |
