| 发明名称 |
Semiconductor single crystal growing apparatus |
| 摘要 |
A semiconductor single crystal growing apparatus is vertically and telescopically provided with a seed holder. The seed holder comprises a seed-holding member for holding a seed and a suspending bolt for bolting the seed-holding member. The front end of the seed coincides with a datum point when the seed holder is moved to a top dead point.
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| 申请公布号 |
US5725660(A) |
申请公布日期 |
1998.03.10 |
| 申请号 |
US19960758475 |
申请日期 |
1996.11.29 |
| 申请人 |
KOMATSU ELECTRONIC METALS CO. LTD. |
发明人 |
HIRAISHI, YOSHINOBU |
| 分类号 |
C30B15/24;C30B15/20;C30B15/30;C30B15/32;C30B29/06;H01L21/208;(IPC1-7):C30B35/00 |
主分类号 |
C30B15/24 |
| 代理机构 |
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代理人 |
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