发明名称 BUMP AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To easily form a bump and to change its height easily by a method wherein the bump, to be formed on the electrode of a semiconductor device, is constituted by a wire whose both ends are connected to the two parts of the electrode. SOLUTION: A pair of Al electrodes 20a and 20b are formed separately with each other on a semiconductor chip 1, and using a capillary 7, the first wire bonding operation is conducted on Al electrodes 20a by a gold wire 5, and the second wire bonding operation is conducted on the other electrode 20b. As a result, a cone-shaped bump 50 is formed by a bonding gold wire 5. At this point, when a wire bonding operation is conducted, the height of the bump 50 can be adjusted by changing the length of the gold wire 5.
申请公布号 JPH1070125(A) 申请公布日期 1998.03.10
申请号 JP19960225111 申请日期 1996.08.27
申请人 MATSUSHITA ELECTRIC WORKS LTD 发明人 KUZUHARA KAZUNARI
分类号 H01L21/60;H01L21/321 主分类号 H01L21/60
代理机构 代理人
主权项
地址