| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to highly accurately set the gap between a diaphragm and a controlling plate and realize the mass-production of ink jet head by a method wherein a means for changing the gap between the controlling plate, which can deform or displace opposite to the diaphragm, and a means for changing the gap between the diaphragm and the controlling plate by deforming or displacing the controlling plate are arranged. SOLUTION: A voltage V1, by which an actuator 9 displaces so as to produce the gap G2 between a diaphragm 6 and a controlling plate 7 of 0.5μm, is applied and held. By applying the pulse roltage of 80V between the diaphragm 6 and the controlling plate 8 under the state just mentioned above, the diaphragm 6 vibrates by the electrostatic force between the diaphragm 6 and the controlling plate 8. After that, when the pulse voltage V2 is turned OFF, the diaphragm 6 deforms to an ink liquid chamber side by restoring force, resulting in discharging ink through a nozzle having a diameter of 25μm at the speed of 6m/sec. Since the gap between the diaphragm 6 and the controlling plate 8 can be varied by deforming the controlling plate 8 through the driving of the actuator 9, the gap can be set to the predetermined value, even when the gap has variation.
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