| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an insulator which can uniformly accommodate itself to an electrode by reducing the roughness of the edge and corner of the insulator, by arranging an electrical insulator film on the upper surface of the base of an electrostatic chuck, and closely adhering the insulator film to the upper surface of the base by applying a pressure to the film and heating the film. SOLUTION: An electric insulator film 45 containing an electrical insulating polymer, such as polyimide, polystyrene, nylon, their mixtures, etc., is arranged on the upper surface 95 of the base 80 of an electrostatic chuck 20. Then, the film 45 is closely adhered to the upper surface 95 of the base 80 with a pressure- sensitive adhesive so that the film 45 can accommodate itself to the upper surface 95 by giving a sufficiently high pressure to the film 45 from a pressuring forming device 25 and heating the film to a high temperature. Therefore, the roughness of the edge and, the corner of the film 45 can be reduced and an insulator which can uniformly accommodate itself to an electrode 50 can be realized.</p> |
