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发明名称
SEMICONDUCTOR WAFER WET-ETCHING TREATMENT DEVICE
摘要
申请公布号
JPH1070103(A)
申请公布日期
1998.03.10
申请号
JP19970192742
申请日期
1997.07.17
申请人
LG SEMICON CO LTD
发明人
SUKUUBIN HAN
分类号
H01L21/306;B08B3/10;H01L21/00;(IPC1-7):H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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