WAVEGUIDE TYPE OPTICAL TRANSMISSION MODULE AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To provide a waveguide type optical transmission module which has high reliability and with which the gas-tightness of a semiconductor element is obtd at a low cost. SOLUTION: A thermoplastic resin film 12 is formed on a flat flat plate consisting of a brittle material, such as glass, ceramic or silicon, and a mask material 13 for forming plural recessed parts is applied on this thermoplastic resin film 12. The surface on which the mask material 13 is applied is subjected to sand blasting and the plural recessed parts are formed on the parts on which the mask is not applied. The flat plate is thereafter cut to small pieces inclusive of the recessed parts by a diamond blade, by which gas-tight caps are formed. These gas-tight caps are adhered and fixed to the pit parts of glass waveguides.