| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus having high rigidity and capable of inexpensively producing, readily approaching all units and pulling up completed crystals without any problem. SOLUTION: A lower supporting frame structure 32 is formed of a platform 38 supported by supports 37, 37', 37" and 37"' and nearly rectangle platform 38 retaining a vacuum chamber 33 is supported by other legs 39, 39' and 39" on three corners among four corners of the platform 38, and these three legs which are vertically extended with same length are retained by a frame 40. The frame 40 whose shape is right-angled triangle extends in a horizontal direction and a face projected from the frame 40 onto the platform 38 occupies nearly half of platform area and a lateral arm 41 is supported on at least one of legs 39, 39' and 39" and a lock chamber 36 is attached to the lateral arm. The lock chamber extends nearly to the lid 42 of the vacuum chamber 33 parallel to these legs 39, 39' and 39". |
