| 摘要 |
PROBLEM TO BE SOLVED: To provide a variable-capacity capacitor where the mechanical resonance frequency is made small without changing the electric series resistance of a cantilever member and Q. SOLUTION: For this variable-capacity capacitor, a fixed electrode 2 to serve as one electrode of a variable-capacity capacitor is made at an insulating substrate 1, and a mobile electrode 4c' to serve as the other electrode of the variable-capacity capacitor is counterposed to this fixed electrode 2 through a gap g, and this mobile electrode 4c' is fixed to the insulating substrate 1 through a supporting arm 4b by a supporting base 4a', and the mobile electrode 4c' is displaced by electrostatic power generated between the fixed electrode 2 and the mobile electrode 4c' by the DC voltage applied between the fixed electrode 2 and the mobile electrode 4c' so as to get variable capacity. In this case, the thickness of the mobile electrode 4c' is made larger than the thickness of the supporting arm 4b.
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