| 摘要 |
PROBLEM TO BE SOLVED: To obtain a highly efficient cell without causing any crack in a thin film by roughening the surface of a substrate and forming irregularities on the surface at a lower average level difference thereby forming suitable irregularities at high speed without requiring any high temperature processing. SOLUTION: Surface of a substrate 1 for solar cell is roughened by sand blasting and irregularities are on the surface at a lower average level difference. Since the light scattering effect is enhanced by the larger irregularities as compared with a conventional one and the optical path length in an amorphous silicon can be lengthened, short circuit current is increased and the efficiency of a solar cell can be enhanced. Average level difference of the irregularities is preferably is 3μm or above for obtaining a sufficient light scattering effect and the average level difference of the smaller irregularities is preferably is 0.5μm or below. |
