| 摘要 |
PROBLEM TO BE SOLVED: To quickly perform measurement of high reliability without giving influence on operation and a reading value even if a strong magnetic field exists by connecting a plurality of Coulomb blocking(CB) tunnel connection parts in parallel in order to measure total impedance of the measuring arrays of a sensor. SOLUTION: A sensor is composed of CB tunnel connection part arrays 4, 4', 4", arranged on a semiconductor substrate 1 and applied to three different temperature ranges. Each connection part array 4, 4', 4" is connected to a common connection electrode 2 on one end through connection conductors respectively, and to independent connection electrodes 3, 3', 3" on the other end respectively. In regard to the sensor, the array desired for specified measurement out of these three connection part arrays 4, 4', 4" is selected by an electronic measuring device. The operation temperature range of the connection part arrays has substantially two orders, the less the connection is, the higher the temperature is, and the larger it is, the less the temperature is. |
