SPUTTERING DEVICE AND FORMATION OF WIRING,申请号JP19960226272-传众专利搜索

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发明名称	SPUTTERING DEVICE AND FORMATION OF WIRING
摘要
申请公布号	JPH1068073(A)	申请公布日期	1998.03.10
申请号	JP19960226272	申请日期	1996.08.28
申请人	SONY CORP	发明人	SASAKI NAOTO
分类号	C23C14/34;H01L21/203;H01L21/285;H01L21/3205;H01L23/52;(IPC1-7):C23C14/34;H01L21/320	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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