| 摘要 |
PROBLEM TO BE SOLVED: To obtain a sensor of high respondency and accuracy, by installing the first and fourth electrodes respectively on the first and third substrates, installing a cantilever beam part composed of a flexible part and a mass part, on a second substrate comprising the second and third electrodes, and adjusting the sensitivity. SOLUTION: A first electrode 12 and a bonding pad 14, and the fourth electrode 32 and a bonding pad 34 are respectively formed on a first substrate 10 and a third substrate 30. A thin flexible part 23 comprising a mass part 22 of which one edge is supported, and the other edge is free, is installed on a supporting part 21 of a second substrate 20 to be used as a cantilever beam. A second electrode 25 and a third electrode 25 respectively faced to the first electrode 12 and a fourth electrode 32, and a bonding pad 28 are installed on the mass part 22, and the first substrate 10, the second substrate 20 and the third substrate 30 are connected through the glass layers 15, 35. By applying this construction, the detecting sensitivity can be arbitrarily adjusted by changing the length, width and thickness of the flexible part 23, a switch can be made compact by a semiconductor process, and the performance and the responding speed can be improved. |
