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发明名称
COMPOUND SEMICONDUCTOR EPITAXIAL WAFER
摘要
申请公布号
JPH1070076(A)
申请公布日期
1998.03.10
申请号
JP19960224003
申请日期
1996.08.26
申请人
SHOWA DENKO KK
发明人
UDAGAWA TAKASHI
分类号
H01L21/205;H01L21/02;H01L21/20;(IPC1-7):H01L21/20
主分类号
H01L21/205
代理机构
代理人
主权项
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