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发明名称
INSPECTION DEVICE AND RESIN SEALING DEVICE WITH THE SAME
摘要
申请公布号
JPH1070144(A)
申请公布日期
1998.03.10
申请号
JP19960226483
申请日期
1996.08.28
申请人
DISCO ABRASIVE SYST LTD
发明人
TANITSU KOJI
分类号
H01L21/56;(IPC1-7):H01L21/56
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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