Method for vaporizing liquid feed and vaporizer therefor

摘要

A high vaporization efficiency can be obtained by efficiently guiding atomized mist particles of a liquid feed material to the surface of a heater device. The method comprises the steps of forming atomized particles having electrical charges; guiding the atomized particles to a feed heater in an electrical force field, and adsorbing the atomized particles on the feed heater by electrostatic attraction forces so as to facilitate a process of vaporization of the liquid feed material.