| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive ink-jet recording head small in size, high in the density of ink nozzles and low in drive voltage without an expensive equipment and without requiring high skill. SOLUTION: A passage substrate 1 and a vibration plate 8 are bonded by holding a coating layer of an inorg. polymer between them to subject the same to heat treatment in the range of 250-450 deg.C to form a silica layer 13. The silica layer 13 is excellent in the wettability with ink and excellent ink emitting characteristics are obtained. When a silicon wafer is employed as the passage substrate 1, stainless steel, an iron-nickel alloy or an iron-nickel-cobalt alloy capable of obtaining a thin plate with a thickness of about 10μm can be used as the vibration plate 8 and large reduction in size, the densification of ink nozzles and the lowering of drive voltage can be realized as compared with conventional technique.
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