发明名称 |
Method of chemically mechanically polishing an electronic component using a non-selective ammonium persulfate slurry |
摘要 |
A method of forming metal patterns in an insulating layer on a semiconductor wafer. After Chem-Mech Polishing (CMP) the insulating layer and forming studs in a planarized insulating layer, the polished surface is chem-mech polished with a touch-up slurry. The touch-up slurry has a nearly identical removal rate for the stud material (tungsten or titanium) as for the insulating material (SiO2). The preferred non-selective slurry is fumed colloidal silica, 8% by weight, and 20 g/l ammonium persulfate.
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申请公布号 |
US5726099(A) |
申请公布日期 |
1998.03.10 |
申请号 |
US19950554880 |
申请日期 |
1995.11.07 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
JASO, MARK ANTHONY |
分类号 |
H01L21/768;C23F1/14;H01L21/304;H01L21/3105;(IPC1-7):H01L21/461 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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