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发明名称
摘要
申请公布号
JP2724488(B2)
申请公布日期
1998.03.09
申请号
JP19890003632
申请日期
1989.01.10
申请人
IITON CORP
发明人
MAABIN FUAAREI
分类号
H01J37/317;G21K1/14;H01J37/02;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J37/317
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