矽晶圆之热处理方法,申请号TW096128979-传众专利搜索

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发明名称	矽晶圆之热处理方法
摘要
申请公布号	TW200818327	申请公布日期	2008.04.16
申请号	TW096128979	申请日期	2007.08.07
申请人	SUMCO TECHXIV股份有限公司	发明人	佐土原;中村浩三;芳野史朗
分类号	H01L21/324(2006.01);H01L21/02(2006.01)	主分类号	H01L21/324(2006.01)
代理机构		代理人	洪澄文
主权项
地址	日本

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