| 摘要 |
PROBLEM TO BE SOLVED: To precisely measure each ball position by a method wherein a calculated position of each ball grid array(BGA) ball is acquired based on images of the BGA, and further a real position of the ball is detected based on the images in an inspection frame set so as to include the position. SOLUTION: BGA's are imaged by a camera to acquire image data, and based on the images, an inclination θ of an external edge of a ball array, and an intersecting point G of vertical and lateral arrays are acquired. Based on the inclination θ and intersecting point G, each ball position can be specified by a specific equation. A detection frame including the calculated position acquired therein is set, and the inspection flame is examined by pixel unit about each position, and abnormalities such as lacks, extra balls, etc., are judged from the number or area of a connecting lump. If the above acquired inclination θand intersecting point G are corrected by the specific equation based on real image data obtained about all of normal balls, each position of balls can be measured with higher precision. |
