| 摘要 |
PROBLEM TO BE SOLVED: To provide the wafer carrier which can prevent a wafer from slipping obliquely over a belt, the rear of a wafer from being damaged by the belt, and dust from being deposited on the wafer. SOLUTION: The wafer carrier is provided with a wafer center sensor 32 sensing the center position of a wafer on a belt 31 on which the wafer is carried, a wafer center correction section 20 that makes the wafer center position obtained from the wafer center sensor 32 match with the center position of a set cassette 12, and a cassette section 10 that stores a wafer 13 into the cassette 12 with the wafer center position and the center position of the cassette kept in matching with each other. |
