| 摘要 |
PROBLEM TO BE SOLVED: To provide a uniform heat ceramics heater capable of preventing partial temperature fall to the utmost and heating a treated body uniformly by forming a circuit pattern so that U shaped turn-up parts of the circuit pattern of a conductor layer comprising a heating element are not directly opposed to each other. SOLUTION: This uniform heat ceramics heater meanderingly forms a circuit pattern 3 of a conductor layer 2 comprising a heating element on an insulation substrate 1 made of ceramics. The circuit pattern 3 is formed so that U shaped turn-up parts 3a of this meandering circuit pattern 3 are not directly opposed to each other. For example, it is preferable that at least one U shaped pattern 3e is formed along the longitudinal direction at the center of the substrate 1, and a wave-shaped patterns 3c, 3c in which a linear insulation part 3d is interposed between both of the left and right of this U shaped pattern 3e is formed respectively. |
