| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce picture parting which causes the deterioration of the picture quality of a liquid crystal display device by deviating the plotting position of a pattern on a reticle and the carrying position of a base plate by a specified amount in a direction perpendicular to the optical axis of a projection optical system and a direction perpendicular to a scanning direction and performing scanning exposure by synchronizing the reticle and the base plate with each other in the case of exposing a layer which influences the picture parting. SOLUTION: The reticle 2 is moved in directions X and Y with the movement of a reticle stage. When the reticle 2 is irradiated with trapezoidal illuminating light beams 6a to 6g, the pattern on the reticle 2 is formed as an image on the trapezoidal projection areas 7a to 7g on the glass base plate 4 through the projection optical systems 5a to 5g. The base plate 4 is moved in the directions X and Y with the movement of an X-Y stage. By moving the reticle stage and the X-Y stage in the direction X synchronizing with the projection optical system, the pattern on the reticle 2 is transferred with uniform exposure distribution in all directions on the base plate 4.</p> |
