发明名称 MULTILAYER CERAMIC BOARD, ITS MANUFACTURING METHOD AND PATTERN INSPECTION DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent the generation of short-circuiting defects between inner layer patterns by handling and fixing a sheet frame with a green sheet sticked thereto, inspecting both surfaces of a green sheet after print by non-contact, and detecting and eliminating conductive foreign matter attached in a preceding process. SOLUTION: A green sheet 1 is stuck to a sheet frame 51 and is subjected to handling, and a hole for a through-hole is shaped in a green sheet 2. A hole 33 of a green sheet 3 is charged with metallic paste, and a through-hole 34 is formed. Then, a green sheet 4 is subjected to print by a screen print method using a screen mask for a circuit pattern, a circuit pattern 35 is formed, and the presence or absence of defects such as foreign matters of a print pattern for both surfaces of a green sheet 5 after print, is inspected by non-contact. Therefore, if print pattern defect exceeding an allowable value is detected by the inspection result, the green sheet 5 can be amended or abolished.
申请公布号 JPH1065345(A) 申请公布日期 1998.03.06
申请号 JP19960218283 申请日期 1996.08.20
申请人 HITACHI LTD 发明人 MIO SHIGEMI;HOSHI SHIRO;MATSUKAWA KIYONAGA;IJICHI HIROAKI
分类号 G01B11/30;H01L21/66;H05K3/46;(IPC1-7):H05K3/46 主分类号 G01B11/30
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