发明名称 CONTINUOUS TREATMENT VACUUM LAMINATION METHOD
摘要 PROBLEM TO BE SOLVED: To enable efficient mass production of solar battery modules of large area by performing vacuum lamination, while a lamination jig which is freely movable between each working area and a loading/unloading equipment is made to travel to each working area, in a specific sequence. SOLUTION: A vacuum lamination jig is moved to a cooling area 441, in which cooling is performed during deaeration using a vacuum pump 442. When the jig is cooled at a temperature capable of handling, a loading/unloading equipment 451 is moved to a position adjacent to the cooling area 441, and then a vacuum lamination jig is moved into the loading/unloading equipment 451. It is taken out and moved to a position adjacent to an area 461. After that, the vacuum lamination jig is moved to a taking-out area, after every one step is unloaded. From the lamination jig, a silicon rubber sheet or the like is taken out.
申请公布号 JPH1065191(A) 申请公布日期 1998.03.06
申请号 JP19960229423 申请日期 1996.08.13
申请人 CANON INC 发明人 YOSHINO TOSHIHITO;ITOYAMA SEIKI;INOUE YUJI;FUKAE KIMITOSHI
分类号 H01L31/04 主分类号 H01L31/04
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