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发明名称
METHOD OF FABRICATING SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH1064795(A)
申请公布日期
1998.03.06
申请号
JP19960222244
申请日期
1996.08.23
申请人
NEC KYUSHU LTD
发明人
HARA TAKAHIRO
分类号
H01L21/302;H01L21/027;H01L21/3065;(IPC1-7):H01L21/027;H01L21/306
主分类号
H01L21/302
代理机构
代理人
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地址
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