| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming an HTS(high-temperature superconductor) Josephson junction which is high in electrical properties, reproducibility and yield. SOLUTION: A Josephson junction 10 of laminated structure is formed through a method such that a planar substrate 12 is formed into a first planar segment 14, a second planar segment 16, and an inclined segment 18 by etching, wherein the inclined segment 18 are joined to the first planar segment 14 and the second planar segment 16 forming an angleθwith them respectively, the first planar segment 14 is set thicker than the second planar segment 16, and the inclined segment 18 is made to decrease gradually in thickness. Then, a first superconducting layer 20 is made to adhere to the surface of the planar substrate 12, a non-superconducting layer 22 is deposited on the first superconducting layer 20, and a second superconducting layer 24 is attached to the non-superconducting layer 22, where the superconducting layers 20 and 24 and the non-superconducting layer 22 are epitaxial on a c-axis in a direction substantially vertical to the planes of the planar segments 14 and 16. The layers 20, 24 and 22 are substantially equal in thickness on the segments 14, 16 and 18.
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