| 摘要 |
<p>A unibody, monolithic, one-piece negative draft crucible (40) for an MBE effusion source (110). The crucible (40) maximizes capacity, uniformity and long-term flux stability, and minimizes oval defects, depletion effects, and short-term shutter-related flux transients. The invention also includes an effusion source (110) employing such a crucible (40), as well as a method and mandrel apparatus (55) for making a unibody containment structure (40), such as a crucible (40) formed of PBN, having a negative draft (46), via chemical vapor deposition.</p> |
