Opto-lithographische Vorrichtung mit kraftkompensiertem Maschinengestell,申请号DE19926021915T-传众专利搜索

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发明名称	Opto-lithographische Vorrichtung mit kraftkompensiertem Maschinengestell
摘要
申请公布号	DE69221915(T2)	申请公布日期	1998.03.05
申请号	DE19926021915T	申请日期	1992.02.28
申请人	PHILIPS ELECTRONICS N.V., EINDHOVEN, NL	发明人	VAN EIJK, JAN, NL-5656 AA EINDHOVEN, NL;VAN ENGELEN, GERARD, NL-5656 AA EINDHOVEN, NL;COX, HENDRIKUS HERMAN MARIE, NL-5656 AA EINDHOVEN, NL;BEEKMAN, HENRICUS ERNEST, NL-5656 AA EINDHOVEN, NL;JACOBS, FRANSISCUS MATHIJS, NL-5656 AA EINDHOVEN, NL
分类号	F16F15/03;F16H21/10;G03F7/20;G03F9/00;H01L21/027;H01L21/30;H02P25/06;(IPC1-7):G03F7/20	主分类号	F16F15/03
代理机构		代理人
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