INLET VALVE WITH A CHOKE EFFECT AND MULTI-STAGE PISTON VACUUM PUMP
摘要
The invention concerns a vacuum pump (1) having an inlet (3) and an outlet (4). According to the invention, in order to prevent disturbance from excess pressure in the pump (1) when it is started, a differential-pressure-controlled inlet valve (52) is provided which chokes the pumping capacity at high inlet pressure.
申请公布号
WO9809079(A1)
申请公布日期
1998.03.05
申请号
WO1997EP04509
申请日期
1997.08.19
申请人
LEYBOLD VAKUUM GMBH;MEYER, JUERGEN;BAHNEN, RUDOLF;BURGHARD, HANS-JOSEF;GIEBMANNS, WOLFGANG
发明人
MEYER, JUERGEN;BAHNEN, RUDOLF;BURGHARD, HANS-JOSEF;GIEBMANNS, WOLFGANG