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发明名称
HF-durchlässiges Vakuumgefäß mit integriertem Faraday-Schirm
摘要
申请公布号
DE19635136(A1)
申请公布日期
1998.03.05
申请号
DE19961035136
申请日期
1996.08.30
申请人
GALVANO-T ELECTROFORMING - PLATING GMBH, 51570 WINDECK, DE
发明人
BUSCH, MICHAEL, 51570 WINDECK, DE;SZCEPANIAK, WERNER, 53783 EITORF, DE;HEINEMANN, BERND, 85304 ILMMUENSTER, DE;RIEDL, RUDOLF, 81247 MUENCHEN, DE
分类号
H01J37/32;(IPC1-7):H05H1/02
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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