发明名称 METHOD FOR OBTAINING A WAFER IN SEMICONDUCTING MATERIAL OF LARGE DIMENSIONS AND USE OF THE RESULTING WAFER FOR PRODUCING SUBSTRATES OF THE SEMICONDUCTOR ON INSULATOR TYPE
摘要 <p>The invention concerns a method for obtaining at least one wafer in semiconducting material by shearing in a bar of semiconducting material (1).The shearing is carried out along a longitudinal plane of the bar to obtain a wafer (10) of large dimensions. The obtained wafer can be used for producing a substrate of the semiconductor on insulator type, for instance a Silicon On Insulator substrate.</p>
申请公布号 WO1998008664(A1) 申请公布日期 1998.03.05
申请号 FR1997001526 申请日期 1997.08.26
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址