METHOD AND DEVICE FOR DIAGNOSING FACILITY FAILURE AND RECORDING MEDIUM STORING PROGRAM FOR MAKING COMPUTER EXECUTE PROCESS FOLLOWING THE METHOD

摘要

A method and device for diagnosing facility failure by which the failure of facility equipment is diagnosed based on the working state of the equipment. The method and device are constituted so that the faulty state of the facility equipment can be discriminated based on the deviatoric process capability value of the equipment by time sequentially acquiring working state parameters representing the working state of the equipment and selecting a specified number of parameters from the acquired working state parameters, and then, whenever a specified number of parameters is selected, calculating the process operability deviation value.