发明名称 Methods for holding and pulling single crystal
摘要 <p>Oscillation of a growing crystal is suppressed in a Czochralski method when part of the growing crystal is mechanically held. Methods for holding and pulling a single crystal in a Czochralski method, wherein a seed crystal (8, 52) is pulled while rotating after the seed crystal (8, 52) is contacted with a raw material melt (2, 54), part of the growing single crystal is mechanically held during pulling and the single crystal of heavy weight can be pulled regardless of mechanical strengths of the seed crystal (8, 52) or a neck portion (9, 55) thereof, wherein the raw material melt (2, 54) is under application of a magnetic field thereto when the growing crystal is mechanically held. <IMAGE></p>
申请公布号 EP0826797(A1) 申请公布日期 1998.03.04
申请号 EP19970306517 申请日期 1997.08.26
申请人 SHIN-ETSU HANDOTAI COMPANY LIMITED 发明人 KIMURA, MASANORI;MURAOKA, SHOZO
分类号 C30B15/00;C30B15/24;C30B15/30;C30B29/06;C30B33/04;H01L21/208;(IPC1-7):C30B15/30 主分类号 C30B15/00
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