| 摘要 |
<p>An optical submount and a method of making the optical submount are described. A pyramidal cavity is formed in a silicon substrate (21a) by anisotropic etching. The cavity has sloping side walls (32,33). A photonics device (23), such as a semiconductor laser or photo detector, is then mounted on the substrate at a predefined distance from the cavity with the optical axis of the photonics device aligned with a diagonal of the cavity. A spherical lens is seated in contact with the side walls of the cavity to have a predefined relationship with the photonics device without light beam obstruction. This arrangement can be used for coupling the device to an optical fiber. <IMAGE></p> |
