Method of fabricating integrated thin film solar cells

摘要

A method of fabricating integrated thin film solar cells, comprising: a step for forming a transparent conductive film on a transparent substrate having an insulative surface; a first scribing step for segmenting the transparent conductive film to form transparent conductive film electrodes; a step for forming an amorphous semiconductor layer on the resulting substrate having the transparent conductive film electrodes; a second scribing step for segmenting the amorphous semiconductor layer to form amorphous semiconductor photoelectric conversion layers; a step for forming a rear electrode layer on the resulting substrate having the amorphous semiconductor photoelectric conversion layers; and a third scribing step for segmenting the rear electrode layer to form rear electrodes; wherein the third scribing step includes forming a resist film on the rear electrode layer, forming trenches in the resist film by laser scribing, and etching off portions of the rear electrode layer with an etchant by using the resulting resist film as a mask.