A method of making a photo detector with an integrated mirror

摘要

An integrated photonics device is described. The integrated photonics device includes a photo detector having an active area. A substrate has a side surface intersecting a top surface of the substrate at a predetermined angle. The side surface is reflective. The photo detector is bonded onto the top surface of the substrate with the active area of the photo detector facing the side surface such that light traveling parallel to the top surface of the substrate can be reflected onto the active area of the photo detector via the side surface. A method of fabricating the integrated photonics device is also described.