| 摘要 |
<p>The present invention relates to a substrate inspection apparatus comprising an upper inspection jig (21) with an electrode region (9) adapted to establish an electrical connection to a substrate to be inspected, an upper reference mark (19) provided at a position suitable for alignment, a lower inspection jig (19) to position either the substrate to be inspected or a positioning plate (7), respectively, the positioning plate (7) having at least one lower reference mark located outside an inspection region for the substrate to be inspected, and a position adjusting means (11, 27, 123 to 141) adapted to adjust the relative positions of the upper inspection jig (21) and the lower inspection jig (19) such that both abut against each other and the upper reference mark (19) and the lower reference mark (17) are aligned.</p> |
