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发明名称
METHOD FOR DEPOSITING MULTILAYERED METALLIC FILM BY EVAPORATION
摘要
申请公布号
JPH1060623(A)
申请公布日期
1998.03.03
申请号
JP19960217136
申请日期
1996.08.19
申请人
NEC CORP
发明人
AKAZAWA KAZUHIKO
分类号
C23C14/04;C23C14/06;(IPC1-7):C23C14/04
主分类号
C23C14/04
代理机构
代理人
主权项
地址
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