| 摘要 |
PROBLEM TO BE SOLVED: To obtain a crucible having excellent resistance to reaction with Si by forming a pyrolytic carbon protective coating film on a semiconductor pulling-up crucible totally or partly consisting of a carbon fiber reinforced carbon composite material (C/C material). SOLUTION: In the manufacture of this crucible, the production of a C/C material used comprises e.g.: impregnating a 3-D (three-dimensionally structured) fibrous material consisting of carbon fiber with a resin; subjecting the impregnated fibrous material to heating and hardening to form a formed body; carbonizing the formed body in a non-oxidizing atmosphere to form a carbonized C/C material; then, successively subjecting the carbonized C/C material to re-impregnation, carbonization and heat treatment at a high temp. to convert it into a graphitized C/C material. At this time, in order to inhibit the conversion of a part of the graphitized C/C material thus produced into SiC by reaction with SiO2 in the surface of the graphitized C/C material, a pyrolytic carbon coating film is formed over minute open pores in the surface of the graphitized C/C material. This film is a high purity pyrolytic carbon coating film and formed by subjecting a gaseous hydrocarbon having three carbon atoms to pyrolysis to form pyrolytic carbon and depositing the resulting pyrolytic carbon on a deep layer inside the graphitized C/C base material and preferably has a <=20μm film thickness. In the figure showing examples of such crucibles, a crucible (a) has a pyrolytic carbon coating film 3 formed over the open pores of a main body 2 and a crucible (b) has a side cylinder part 2a which consists of a graphitized C/C material and only on the inner surface side of which a pyrolytic carbon coating film 3 is formed. |
