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发明名称
METHOD FOR RELEASING DEPOSITED FILM
摘要
申请公布号
JPH1060621(A)
申请公布日期
1998.03.03
申请号
JP19960239944
申请日期
1996.08.23
申请人
MATSUDA SANGYO KK
发明人
NAKAMURA TOMONOBU;MATSUI TAISUKE
分类号
C23C14/00;H01L21/205;(IPC1-7):C23C14/00
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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